JPS6315016Y2 - - Google Patents

Info

Publication number
JPS6315016Y2
JPS6315016Y2 JP12256381U JP12256381U JPS6315016Y2 JP S6315016 Y2 JPS6315016 Y2 JP S6315016Y2 JP 12256381 U JP12256381 U JP 12256381U JP 12256381 U JP12256381 U JP 12256381U JP S6315016 Y2 JPS6315016 Y2 JP S6315016Y2
Authority
JP
Japan
Prior art keywords
mounting plate
operating member
long hole
arm
long
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12256381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5829838U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12256381U priority Critical patent/JPS5829838U/ja
Publication of JPS5829838U publication Critical patent/JPS5829838U/ja
Application granted granted Critical
Publication of JPS6315016Y2 publication Critical patent/JPS6315016Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Electron Beam Exposure (AREA)
JP12256381U 1981-08-19 1981-08-19 クランプ装置 Granted JPS5829838U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12256381U JPS5829838U (ja) 1981-08-19 1981-08-19 クランプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12256381U JPS5829838U (ja) 1981-08-19 1981-08-19 クランプ装置

Publications (2)

Publication Number Publication Date
JPS5829838U JPS5829838U (ja) 1983-02-26
JPS6315016Y2 true JPS6315016Y2 (en]) 1988-04-26

Family

ID=29916484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12256381U Granted JPS5829838U (ja) 1981-08-19 1981-08-19 クランプ装置

Country Status (1)

Country Link
JP (1) JPS5829838U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0648319Y2 (ja) * 1989-04-15 1994-12-12 衣浦化成株式会社 瓦焼成治具

Also Published As

Publication number Publication date
JPS5829838U (ja) 1983-02-26

Similar Documents

Publication Publication Date Title
US5692873A (en) Apparatus for holding a piece of semiconductor
US6213708B1 (en) System for sorting multiple semiconductor wafers
JPH07130695A (ja) 回転式基板処理装置の基板回転保持具
JP4275420B2 (ja) 基板処理装置および基板処理方法
JPS6315016Y2 (en])
JP4601130B2 (ja) ウエハーハンドリングロボットのティーチング装置および方法
JPH07211766A (ja) 中心合わせ装置
US4344380A (en) Apparatus for applying photo resist on both surfaces of semiconductor wafer
US4898639A (en) Wafer retention device
JPH0536814A (ja) ウエハ移載装置
JPH07130637A (ja) 半導体製造装置
JP3018727B2 (ja) 半導体製造ウェット処理装置
JPS6227743B2 (en])
US4646418A (en) Carrier for photomask substrate
JP3642848B2 (ja) 基板回転保持装置および回転式基板処理装置
JPH11251414A (ja) 機械式スピンチャック
JPH0545489B2 (en])
KR100238947B1 (ko) 반도체 웨이퍼 탑재장치
JP3401803B2 (ja) ウェーハ移載方法、ウェーハ保持用キャリアステージ、ウェーハ移載装置、及び半導体
JPH0325917A (ja) 半導体製造装置
JP2967895B2 (ja) 半導体ウェーハの保持装置
JPH02720U (en])
JPH041150Y2 (en])
JPH0423750A (ja) 半導体ウエハ用移送アームの安定型吸着パット
JP2001102421A (ja) 基板搬送装置および基板処理装置